Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1993-02-18
1994-03-15
Pascal, Robert J.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
333150, H01L 4104, H01L 4108, H01L 4118, H02N 200
Patent
active
052948587
ABSTRACT:
Disclosed herein is a surface acoustic wave device employing diamond, which has an operation frequency in a range of several hundred MHz to several GHz, a high propagation velocity and a large electromechanical coefficient. This surface acoustic wave comprises a substrate, a diamond layer which is formed on the substrate, a ZnO layer which is formed on the diamond layer, and interdigital electrodes which are formed on the ZnO layer, and utilizes a second order mode of a surface acoustic wave which is excited in a structure satisfying (2.pi..H/.lambda.)=0.9 to 2.3 where H represents the thickness of the ZnO layer and .lambda. represents the wavelength of the surface acoustic wave. This surface acoustic wave device can be used in an extremely high frequency range, whereby the same is applicable to a resonator, a delay line, a signal processing device, a convolver, a correlator or the like in addition to a filter.
REFERENCES:
patent: 4952832 (1990-08-01), Imai et al.
patent: 5160869 (1992-11-01), Nakahata et al.
Fujimori Naoji
Hachigo Akihiro
Nakahata Hideaki
Shikata Shin-ichi
Fasse W. G.
Gambino Darius
Pascal Robert J.
Sumitomo Electric Industries Ltd.
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