Probe unit for near-field optical scanning microscope

Details Probe unit for near-field optical scanning microscope Probe unit for near-field optical scanning microscope

1992-10-06

1994-03-15

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

25022724, 250306, H01J 314

Patent

active

052947904

ABSTRACT:
A hole is formed in a silicon substrate, passing through the substrate. An insulating film is formed on one face of the silicon substrate and one open end of the hole is thus closed by the insulating film. An antireflection film is attached to that area of the insulating film by which the one open end of the hole is closed. An optical fiber is fitted and fixed in the hole. An optically-transparent conical probe is formed on the area of the insulating film which corresponds to the hole in the silicon substrate and the probe is coated by a metal film while leaving a tip of the probe not coated. A fine aperture is thus formed at the tip of the probe to allow light to enter into the probe through the fine aperture. The metal film prevents light reflected from entering into the probe and light from being leaked from the probe, and it is connected to an electrode to use tunnel current to position the fine aperture near a sample.

REFERENCES:
patent: 5018865 (1991-05-01), Ferrell et al.
patent: 5025147 (1991-06-01), Durig et al.
Appl. Phys. Lett. 52(4), Jan. 24, 1988, "Near-Field Optical Scanning Microscopy In Reflection"; Fischer et al., pp. 249-251.
Appl. Phys. Lett. 49(11), Sep. 15, 1986, "Super-Resolution Fluorescence Near-Field Scanning Optical Microscopy"; Harootunian et al.; pp. 674-676.
Scanning Microscopy, vol. 3, No. 1, 1989; pp. 1-7; "Scanning Near Field Optical Microscopy (SNOM) In Reflection Or Scanning Optical Tunneling Microscopy (SOTM)"; Fisher et al.
J. Appl. Phys. 59(10), May 15, 1986; "Near-Field Optical-Scanning Microscopy"; Durig et al.; pp. 3381-3327.

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