Barrier improvement in thin films

Details Barrier improvement in thin films Barrier improvement in thin films

1993-03-29

1994-03-15

Zimmerman, John

Stock material or miscellaneous articles

All metal or with adjacent metals

Composite; i.e., plural, adjacent, spatially distinct metal...

428675, 428929, 257751, B32B 1500

Patent

active

052944867

ABSTRACT:
An improved thin film barrier with three layers where an interlayer is between barrier layers on each side, the interlayer serving as an atom energy sink. The improved barrier in the diffusion of Cu through Ni into Au where the barrier layers are Ni and the interlayer is Au, making a stack of AuNiAuNiCu, reduces the Cu present in the external Au layer after prolonged annealing in the vicinity of 0.2% atomic.

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