Patent
1989-12-11
1991-08-13
Jackson, Jr., Jerome
357 234, 357 67, 357 231, H01L 2701
Patent
active
050400371
ABSTRACT:
A SOI-MOSFET formed on a thin semiconductor layer (3) having a thickness not more than 1500.ANG. includes a charge carrier absorbing region (9a, 9b, 9c) contacting with at least a portion of the bottom of a channel region (6) of a first conductivity type and with at least a portion of the bottom of a source region (7, 7a) of a second conductivity type. The carrier absorbing region (9a, 9b, 9c) absorbs excess carriers of the first conductivity type contained in the channel region (6).
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J. Colinge, "Reduction of Kink Effect in Thin-Film SOI MOSFET's", IEEE Electron Device Letters, vol. 9, No. 2, Feb. 1988, pp. 97-99.
Kusunoki Shigeru
Yamaguchi Yasuo
Hung Dang Xuan
Jackson, Jr. Jerome
Mitsubishi Denki & Kabushiki Kaisha
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