Process for fabricating thin film image pick-up element

Details Process for fabricating thin film image pick-up element Process for fabricating thin film image pick-up element

1984-02-22

1985-05-21

Roy, Upendra

Metal working

Method of mechanical manufacture

Assembling or joining

148 15, 148175, 357 31, 427 38, H01L 2714, H01L 4902, H01L 21425

Patent

active

045177333

ABSTRACT:
A thin film image pickup element which consists of a photoelectric converter including a transparent electrode, a semiconductor layer, an opaque electrode and first insulator layer, and a switching element including first and second upper electrodes, another semiconductor layer, a gate electrode and a passivation film covered on the gate electrode. A two-dimensional thin film image pickup device consists of a plurality of such thin film image pickup elements by stereoscopically laminating a plurality of photoelectric converters and switching elements with the back surface used as wiring region. The device can read two-dimensional original documents without using a reducing optical system.

REFERENCES:
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patent: 4380557 (1983-04-01), Ishioka et al.
patent: 4398343 (1983-08-01), Yamazaki
patent: 4439912 (1984-04-01), Pollard et al.
patent: 4445269 (1984-05-01), Pollard
patent: 4459739 (1984-07-01), Shepherd et al.

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