Optical window member and method for production thereof

Details Optical window member and method for production thereof Optical window member and method for production thereof

1990-02-08

1991-08-13

Arnold, Bruce Y.

Optical: systems and elements

Optical aperture or tube, or transparent closure

359900, 359893, 430 5, 51307, G02B 500

Patent

active

050392034

ABSTRACT:
An optical window member comprises a substrate having a multiplicity of through-holes, and a diamond film formed on one surface of the substrate and covering the through-holes. A method for producing the optical window member comprises forming a thin film of diamond on one surface of the substrate, imparting a pattern to a photoresist layer formed on the substrate for partially exposing the substrate, and removing the exposed part of the substrate by etching thereby partically forming a diamond monolayer region. The thus obtained substrate possessing a multiplicity of through-holes assumes a lattice-like form, gives shape to the diamond monolayer region and, at the same time, prevents the thin diamond film from being warped or curved, and imparts improved compression strength to the diamond film and protects the diamond film against fracture.

REFERENCES:
patent: 4296143 (1981-10-01), Franken et al.
patent: 4319889 (1982-03-01), Villalobos
patent: 4421386 (1983-12-01), Podgorski
patent: 4466938 (1984-08-01), Gigl et al.
patent: 4704342 (1987-11-01), Lehrer et al.

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