Optics: measuring and testing – By alignment in lateral direction
Patent
1997-03-14
1998-11-10
Font, Frank G.
Optics: measuring and testing
By alignment in lateral direction
356383, G01B 1100, G01B 1102
Patent
active
058352279
ABSTRACT:
A method and apparatus for determining performance characteristics in lithographic tools includes projecting a predetermined image with a projection system having a known predetermined performance characteristic to obtain data indicative of the relationship between the size of the projected image and the predetermined performance characteristic. The same image is then projected in a system having an unknown value for the predetermined performance characteristic. The predetermined performance characteristic for the system under consideration is then determined based on the data obtained when the image was projected in the system having the known predetermined performance characteristic.
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Grodnensky Ilya
Hirukawa Shigeru
Morita Etsuya
Suwa Kyoichi
FitzGerald Joseph T.
Font Frank G.
Nikon Precision Inc.
Stafira Michael P.
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