Vacuum attraction type substrate holding device

Details Vacuum attraction type substrate holding device Vacuum attraction type substrate holding device

1991-11-27

1993-04-20

Watson, Robert C.

Work holders

With fluid means

Vacuum-type holding means

B25B 1100

Patent

active

052035476

ABSTRACT:
A vacuum attraction type substrate holding system includes a vacuum source; a distributor for distributing a vacuum from the vacuum source into plural vacuum lines; a plurality of vacuum attraction type substrate holding portions corresponding to the vacuum lines, respectively, each of the substrate holding portions having a valve which is openable and closable for control of the supply of vacuum to the corresponding substrate holding portions, wherein the opening or closing of each valve is influential to control attraction or release of a substrate to or from a corresponding substrate holding portion; and a plurality of restriction valves each being disposed between the distributor and corresponding one of the valves, for serving as a resistance to a gas flowing from the corresponding valve.

REFERENCES:
patent: 3729206 (1973-04-01), Cachon et al.
patent: 3907268 (1975-09-01), Hale
patent: 4444492 (1984-04-01), Lee
patent: 4693458 (1987-09-01), Lewecke et al.

Affiliated with

Also associated with

Rating

Vacuum attraction type substrate holding device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vacuum attraction type substrate holding device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vacuum attraction type substrate holding device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1520357