Apparatus and method for removing minute particles from a substr

Cleaning and liquid contact with solids – Processes – Using solid work treating agents

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134 93, 261 75, 261 89, 261 95, 261158, 51320, 51410, B08B 700

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active

048061719

ABSTRACT:
Apparatus for removing small particles from a substrate comprising a source of fluid carbon dioxide, a first means for expanding a portion of the fluid carbon dioxide into a first mixture containing gaseous carbon dioxide and fine droplets of liquid carbon dioxide, coalescing means for converting the first mixture into a second mixture containing gaseous carbon dioxide and larger liquid droplets of carbon dioxide, second expansion means for converting said second mixture into a third mixture containing solid particles of carbon dioxide and gaseous carbon dioxide, and means for directing said third mixture toward the substrate. Also disclosed are methods for removing fine particles from substrates utilizing the subject apparatus.

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Bangold, R.-The Physics of Sand and Desert Dunes, Chapman and Hall, London (1966) pp. 25-37.
Corn, M. "The Adhesion of Solid Particles to Solid Surface", J. Air. Poll. Cart. Assoc. vol. 11, No. 11 (1961) pp. 523-528.
Gallo, C. F. & Lama, W. C. "Classicial Electrostatic Description of the Work Function and Ionization Energy of Insulators", IEEE Trans. Ind. Appl. vol. LIA-12, No. 2 (Jan.-Feb. 1976) pp. 7-11.
Hoenig, S. A.-"Cleaning Surfaces with Dry Ice", Compressed Air Magazine, Aug., 1986, pp. 22-25).
Hoenig, S. A.-"The Application of Dry Ice to the Removal of Particulates from Optical Apparatus, Spacecraft, Semiconductor Wafers, and Equipment Used in Contaminant Free Manufacturing Processes", Sep. 1985.

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