Electron source and electron beam-emitting apparatus equipped wi

Details Electron source and electron beam-emitting apparatus equipped wi Electron source and electron beam-emitting apparatus equipped wi

1997-02-06

1998-11-10

Nguyen, Kiet T.

Radiant energy

Ion generation

Field ionization type

313336, H01J 3726

Patent

active

058347810

ABSTRACT:
An SE electron source in an apparatus utilizing an electron beam such as an electron microscope or electron beam lithography machine has an electron source structure particularly well suited for an electron gun in which the probe current is varied by the control voltage. The electron source includes a needle whose tip has a cone angle of less than 15 degrees and a radius of curvature of less than 0.5 .mu.m. In an electron gun using an SE electron source according to the invention, the range of variations in probe current caused by a given variation in control voltage is increased, permitting one extraction voltage setting to suffice and the value of the extraction voltage to decrease. Damage to the needle tip due to electric discharge is prevented adding to the stability of the electron gun.

REFERENCES:
patent: 4663559 (1987-05-01), Christensen
patent: 4954711 (1990-09-01), Fink et al.
patent: 5155412 (1992-10-01), Chang et al.
patent: 5191217 (1993-03-01), Kane et al.
patent: 5536944 (1996-07-01), Tsunoda et al.
patent: 5587586 (1996-12-01), Kruit

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