Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1993-06-15
1996-01-23
Turner, Samuel A.
Optics: measuring and testing
By particle light scattering
With photocell detection
356345, 356237, 356351, G01B 902
Patent
active
054869196
ABSTRACT:
Disclosed is an inspection method and apparatus: wherein (i) first light having a first state of polarization and a first wavelength, and (ii) second light having a second state of polarization, different from the first state of polarization, and a second wavelength, different from the first wavelength are produced; at least the first light is projected to a position of inspection; and heterodyne interference light produced on the basis of the second light and light scattered at the inspection position and having its state of polarization changed, by the scattering, from the first state of polarization, is detected.
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Miyazaki Kyoichi
Mori Tetsuzo
Nose Noriyuki
Takeuchi Seiji
Tsuji Toshihiko
Canon Kabushiki Kaisha
Kim Robert
Turner Samuel A.
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