Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1990-06-20
1991-12-31
Turner, Samuel
Optics: measuring and testing
By particle light scattering
With photocell detection
356376, 356371, 356358, 356 73, G01B 902
Patent
active
050766937
ABSTRACT:
An optical contour measuring apparatus comprises: a light source capable of radiating two superposed orthogonally polarized light beams of different frequencies; a first optical sensing means for detecting an optical beat generated by the superposition of the two orthogonally polarized light beams radiated by the light source; a polarizing beam splitting means for dividing the two superposed orthogonally polarized light beams radiated by the light source, according to the direction of polarization; a second optical sensor for detecting an optical beat generated by the superposition of one polarized light beam divided by the polarizing beam splitter, and another polarized light beam divided by the polarizing beam splitter means and reflected by a surface of an object to be measured; a position detector for detecting the position of reception of another polarized light beam divided by the polarizing beam splitter and reflected by the surface of the object; and a microcomputer. The microcomputer detects the height of the surface of the object on the basis of the phase difference between the phase of a beat signal provided by the first optical sensor and the phase of a beat signal provided by the second optical sensor. The microcomputer also detects the height of the surface of the object on the basis of the position detected by the position detecting means.
REFERENCES:
patent: 4708483 (1987-11-01), Lorenz
patent: 4803374 (1989-02-01), Monfort
patent: 4912530 (1990-03-01), Bessho
"Angstrom Resolution Optical Profilometry for Microscopic Objects" Franco Laeri et al., Applied Optics, vol. 26, No. 11, Jun. 1987, pp. 2245-2249.
"Optical Heterodyne Profilometry", Gary E. Sommargren, Applied Optics, vol. 20, No. 4, Feb. 1981, pp. 610-618.
Brother Kogyo Kabushiki Kaisha
Kurtz Richard
Turner Samuel
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