Substrate transporting device

Details Substrate transporting device Substrate transporting device

1998-07-16

1999-09-14

Walberg, Teresa

Heating

Accessory means for holding, shielding or supporting work...

432245, F27D 312

Patent

active

059512830

ABSTRACT:
A substrate transporting device used in the process of manufacturing, for instance, semiconductor chips including a substrate guide comprised of a substrate guide rail which guides one side of each substrate and a substrate supporting plate which supports another side of the substrate, feeding claws for feeding a substrate to, for instance, a bonding position, the feeding claws being provided on a feeding claw holder and extending in the direction perpendicular to the substrate supporting plate, a claw X-direction feeder which moves the feeding claw holder in a direction in which the substrate is conveyed along the substrate guide, and a claw Y-direction feeder which moves the feeding claw holder in a direction perpendicular to the direction in which the substrate is conveyed along the substrate guide; thus, the substrates are conveyed one pitch at a time by means of a rectangular motion of the feeding claws on a horizontal plane effected by the claw X-direction feeder and the claw Y-direction feeder.

REFERENCES:
patent: 5716207 (1998-02-01), Mishina et al.
patent: 5762745 (1998-06-01), Hirose
patent: 5837555 (1998-11-01), Kaltenbrunner et al.

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