Manufacture of silicon nitride powder

Chemistry of inorganic compounds – Silicon or compound thereof – Binary compound

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23277R, C01B 2106

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039377920

ABSTRACT:
A method of manufacturing a silicon nitride powder comprises heating a bed of silicon powder in a furnace having an atmosphere containing nitrogen so that the silicon reacts with the nitrogen to produce silicon nitride. The exothermic reaction between the silicon and the nitrogen is monitored, either by comparing the temperature in the reaction bed with the temperature at another point in the furnace, or by allowing the nitrogen containing atmosphere to flow through the furnace and measuring the rates of flow of the atmosphere into and out of the furnace. The partial pressure of the nitrogen in the furnace atmosphere is then controlled in accordance with the exothermic reaction so as to ensure that the temperature in the bed does not exceed a predetermined value above which .beta.-phase silicon nitride is formed, the partial pressure of the nitrogen in the furnace being controlled by effecting at least one of the steps of:

REFERENCES:
patent: 2330767 (1943-09-01), Welty, Jr.
patent: 2519481 (1950-08-01), Kubie et al.
patent: 2788264 (1957-04-01), Bremer et al.
patent: 3222438 (1965-12-01), Parr et al.
patent: 3591337 (1971-07-01), Lumbey

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