Structure for protecting air bridges on semiconductor chips from

Details Structure for protecting air bridges on semiconductor chips from Structure for protecting air bridges on semiconductor chips from

1994-12-19

1996-10-01

Picardat, Kevin M.

Fishing, trapping, and vermin destroying

437205, 437207, 437215, 437218, H01L 2160

Patent

active

055610854

ABSTRACT:
A protective cap is deposited over the top and sides of an air bridge structure located on an integrated circuit chip. The protective cap provides mechanical strength during the application of a high density interconnect structure over the chips, to prevent deformation of the sensitive (air bridge) structure, and also to prevent any contamination from intruding under the air bridge. More importantly, the protective cap does not impede the performance of the air bridge and therefore does not need to be removed, thereby eliminating the necessity of ablating the HDI structure. Furthermore, the protective cap allows additional area for metallization to provide alternate circuits for coupling, power or ground planes, etc.

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