Process for producing hybrid circuits with integrated capacitors

Details Process for producing hybrid circuits with integrated capacitors Process for producing hybrid circuits with integrated capacitors

1983-11-03

1984-07-17

Tufariello, T. M.

Electricity: electrical systems and devices

Miscellaneous

204 15, 361306, H05K 702, C25D 502

Patent

active

044609388

ABSTRACT:
Process for the production of hybrid circuits with integrated capacitors and resistors in which a thin film of tantalum doped with nitrogen and oxygen is deposited on a substrate, this tantalum film is etched to form a base electrode for the said capacitors and a pattern for the resistors, a mask is placed on the etched film and through the said mask a first anodic oxidation of the tantalum film is performed and at the end of this process a metal coating is deposited and etched in an appropriate manner for forming a second electrode for the capacitors and electrical connections for the system, wherein following the first anodic oxidation a second, more advanced anodic oxidation of the tantalum film is carried out solely at the locations of the resistors in order to selectively reduce the thickness of the tantalum film.
The invention also relates to the hybrid circuit with integrated capacitors and resistors obtained by this process.

REFERENCES:
patent: 3542654 (1970-11-01), Orr
patent: 3699011 (1972-10-01), Nishimura
patent: 3699011 (1972-10-01), Nishimura
patent: 3801366 (1974-04-01), Lemelson
Baeger, "A Single Ta-Film for Manufacture of Integrated Temperature Compensated RC Networks" at International Conference on Thin and Thick Film Technology, Augsburg, German Federal Republic in Sep. 1977.
Worsbey et al., "Tatalum Thin-Film RC Circuit Tech. for a Universal Active Filter", IEEE Transactions on Parts, Hybrid, and Packaging, vol. PHP 12, No. 4, Dec. 1976, pp. 276-282.

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