Photosensitive O-quinone diazide containing composition

Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...

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Details

430165, 430166, 430313, 430314, 430318, 430327, 430329, 430330, 430331, 20415923, G03C 154, G03C 160, G03C 170

Patent

active

042686024

ABSTRACT:
The present invention relates to a novel photosensitive composition. In particular, the present invention relates to a photosensitive resin composition suitable for use as a photoresist.

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patent: 3533796 (1970-10-01), Lassig et al.
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patent: 3725356 (1973-04-01), Ludeus et al.
patent: 3759711 (1973-09-01), Rauner et al.
patent: 3933885 (1976-01-01), Satomura
patent: 4093461 (1978-06-01), Loprest et al.
patent: 4104070 (1978-08-01), Moritz et al.
Dinaburg, M. S., "Photosensitive Diazo Cpds", The Focal Press, 1964, pp. 191-196.

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