Method and apparatus for fabricating optical waveguide grating r

Details Method and apparatus for fabricating optical waveguide grating r Method and apparatus for fabricating optical waveguide grating r

1977-05-26

1978-06-06

Stern, Ronald J.

350 9619, G02B 518, G02B 532, G03H 104

Patent

active

040933393

ABSTRACT:
A helium cadmium laser generates an output beam of radiation which is coupled through a spatial filter and beam expander to a beam splitter which in turn provides two enlarged beams of coherent radiation of approximately equal power. Two highly reflective mirrors are used to direct the two beams such that the two beams interfere and create the usual interference pattern in a positive photoresist layer covering an optical substrate. A thin sheet of high index glass is held by two blocks of quartz in a position adjacent to the photoresist layer and oriented such that a part of each beam of coherent radiation is caused to pass through the high index glass before interfering with the other beam on the photoresist layer. As a result, a grating having a quarter wavelength step or discontinuity in the middle of the grating is fabricated in the photoresist. The photoresist pattern is then transferred to the optical waveguide by ion-beam milling. Several high index sheets can be positioned so as to create more than a single quarter wavelength step.

REFERENCES:
patent: 3622220 (1971-11-01), Kogelnik
patent: 3977763 (1976-08-01), Ostrowsky
Mollenauer et al., Applied Optics, vol. 16, No. 3, Mar. 1977, pp. 555-557.
Shank et al., Applied Physics Letters, vol. 23, No. 3, Aug. 1973, pp. 154-155.
Haus et al., IEEE Jour. of Quantum Electronics, vol. QE-12, No. 9, Sep. 1976, pp. 532-539.
Garvin et al., Applied Optics, vol. 12, No. 3, Mar. 1973, pp. 455-459.
Brown et al., Applied Optics, vol. 5, No. 6, Jun. 1966, pp. 967-969.
Hauk et al., Optik, vol. 15, No. 5, May 1958, pp. 275-277.

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