Mesa type semiconductor device with guard ring

Details Mesa type semiconductor device with guard ring Mesa type semiconductor device with guard ring

1981-01-26

1984-05-22

Edlow, Martin H.

357 38, 357 52, 357 55, H01L 2974, H01L 2934, H01L 2906

Patent

active

044504691

ABSTRACT:
The present invention is directed to a mesa type semiconductor device, formed in a body of semiconductor material, containing at least one guard ring region. The at least one guard ring region is formed to a relatively shallow depth within the body thereby reducing the height of the mesa above the main portion of the body of semiconductor material. The resultant device is physically stronger than prior art devices.

REFERENCES:
patent: 3341380 (1967-09-01), Mets et al.
patent: 4003072 (1977-01-01), Matsushita et al.
patent: 4305085 (1981-12-01), Jarcklin et al.
patent: 4377816 (1983-03-01), Sittig

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