Pressure sensor cavity etched with hot POCL.sub.3 gas

Details Pressure sensor cavity etched with hot POCL.sub.3 gas Pressure sensor cavity etched with hot POCL.sub.3 gas

1999-03-26

2000-07-04

Felber, Joseph L.

Measuring and testing

Fluid pressure gauge

Diaphragm

29839, G01L 912

Patent

active

06082199&

ABSTRACT:
A transmitter in a process control system transmits a pressure over a process control loop. The transmitter includes I/O circuitry, compensation circuitry and an absolute pressure sensor. The I/O circuitry transmits information over the process control loop. Compensation circuitry receives a pressure related signal and responsively controls the I/O circuitry to transmit pressure information on the loop. The absolute pressure sensor includes a cavity which deforms as the sensor deflects in response to an applied pressure. A sensor in the cavity provides the pressure related signal to the compensation circuitry in response to the deformation.

REFERENCES:
patent: Re28798 (1976-05-01), Herring et al.
patent: 3079576 (1963-02-01), Kooiman
patent: 3147085 (1964-09-01), Gatti
patent: 3239827 (1966-03-01), Werner et al.
patent: 3356963 (1967-12-01), Buck
patent: 3387226 (1968-06-01), Haisma et al.
patent: 3405559 (1968-10-01), Moffatt
patent: 3477036 (1969-11-01), Haisma
patent: 3589965 (1971-06-01), Wallis et al.
patent: 3645137 (1972-02-01), Hazen
patent: 3696985 (1972-10-01), Herring et al.
patent: 3743552 (1973-07-01), Fa
patent: 3744120 (1973-07-01), Burgess et al.
patent: 3750476 (1973-08-01), Brown
patent: 3766634 (1973-10-01), Babcock et al.
patent: 3834604 (1974-09-01), Fendley et al.
patent: 3854892 (1974-12-01), Burgess et al.
patent: 3858097 (1974-12-01), Polye
patent: 3939559 (1976-02-01), Fendley et al.
patent: 3962921 (1976-06-01), Lips
patent: 3994430 (1976-11-01), Cusano et al.
patent: 4018374 (1977-04-01), Lee et al.
patent: 4064549 (1977-12-01), Cretzler
patent: 4078711 (1978-03-01), Bell et al.
patent: 4084438 (1978-04-01), Lee et al.
patent: 4088799 (1978-05-01), Kurtin
patent: 4127840 (1978-11-01), House
patent: 4128006 (1978-12-01), Grabow
patent: 4158217 (1979-06-01), Bell
patent: 4196632 (1980-04-01), Sikorra
patent: 4202217 (1980-05-01), Kurtz et al.
patent: 4208782 (1980-06-01), Kurtz et al.
patent: 4216404 (1980-08-01), Kurtz et al.
patent: 4222277 (1980-09-01), Kurtz et al.
patent: 4236137 (1980-11-01), Kurtz et al.
patent: 4257274 (1981-03-01), Shimada et al.
patent: 4274125 (1981-06-01), Vogel
patent: 4276533 (1981-06-01), Tominaga et al.
patent: 4278195 (1981-07-01), Singh
patent: 4287501 (1981-09-01), Tominaga et al.
patent: 4301492 (1981-11-01), Paquin et al.
patent: 4359498 (1982-11-01), Mallon et al.
patent: 4366716 (1983-01-01), Yoshida
patent: 4389895 (1983-06-01), Rud, Jr.
patent: 4410872 (1983-10-01), Stecher et al.
patent: 4412203 (1983-10-01), Kurtz et al.
patent: 4419142 (1983-12-01), Matsukawa
patent: 4422125 (1983-12-01), Antonazzi et al.
patent: 4422335 (1983-12-01), Ohnesorge et al.
patent: 4424713 (1984-01-01), Kroninger, Jr. et al.
patent: 4434665 (1984-03-01), Adolfsson et al.
patent: 4443293 (1984-04-01), Mallon et al.
patent: 4454765 (1984-06-01), Lodge
patent: 4456901 (1984-06-01), Kurtz et al.
patent: 4479070 (1984-10-01), Frische et al.
patent: 4495820 (1985-01-01), Shimada et al.
patent: 4497473 (1985-02-01), Robyn et al.
patent: 4507973 (1985-04-01), Barr et al.
patent: 4517622 (1985-05-01), Male
patent: 4525766 (1985-06-01), Petersen
patent: 4535219 (1985-08-01), Sliwa, Jr.
patent: 4539061 (1985-09-01), Sagiv
patent: 4542436 (1985-09-01), Carusillo
patent: 4547801 (1985-10-01), Haisma et al.
patent: 4558817 (1985-12-01), Kiendl
patent: 4572000 (1986-02-01), Kooiman
patent: 4586109 (1986-04-01), Peters et al.
patent: 4591401 (1986-05-01), Neidig et al.
patent: 4598996 (1986-07-01), Taniuchi
patent: 4609966 (1986-09-01), Kuisma
patent: 4625559 (1986-12-01), Carter et al.
patent: 4649070 (1987-03-01), Kondo et al.
patent: 4689999 (1987-09-01), Shkedi
patent: 4703658 (1987-11-01), Mrozack, Jr. et al.
patent: 4753109 (1988-06-01), Zabler
patent: 4754365 (1988-06-01), Kazahaya
patent: 4764747 (1988-08-01), Kurtz et al.
patent: 4773972 (1988-09-01), Mikkor
patent: 4774196 (1988-09-01), Blanchard
patent: 4780572 (1988-10-01), Kondo et al.
patent: 4800758 (1989-01-01), Knecht et al.
patent: 4806783 (1989-02-01), Anderson
patent: 4810318 (1989-03-01), Haisma et al.
patent: 4849374 (1989-07-01), Chen et al.
patent: 4852408 (1989-08-01), Sanders
patent: 4857130 (1989-08-01), Curtis
patent: 4875368 (1989-10-01), Delatorre
patent: 4879903 (1989-11-01), Ramsey et al.
patent: 4883215 (1989-11-01), Goesele et al.
patent: 4901197 (1990-02-01), Albarda et al.
patent: 4908921 (1990-03-01), Chen et al.
patent: 4929893 (1990-05-01), Sato et al.
patent: 4954925 (1990-09-01), Bullis et al.
patent: 4971925 (1990-11-01), Alexander et al.
patent: 4972717 (1990-11-01), Southworth et al.
patent: 4980243 (1990-12-01), Malikowski et al.
patent: 4983251 (1991-01-01), Haisma et al.
patent: 4994781 (1991-02-01), Sahagen
patent: 5001934 (1991-03-01), Tuckey
patent: 5005421 (1991-04-01), Hegner et al.
patent: 5009689 (1991-04-01), Haisma et al.
patent: 5013380 (1991-05-01), Aoshima
patent: 5024098 (1991-06-01), Petitjean et al.
patent: 5028558 (1991-07-01), Haisma et al.
patent: 5050034 (1991-09-01), Hegner et al.
patent: 5050035 (1991-09-01), Hegner et al.
patent: 5068712 (1991-11-01), Murakami et al.
patent: 5084123 (1992-01-01), Curtis
patent: 5087124 (1992-02-01), Smith et al.
patent: 5094109 (1992-03-01), Dean et al.
patent: 5095741 (1992-03-01), Bartig et al.
patent: 5113868 (1992-05-01), Wise et al.
patent: 5133215 (1992-07-01), Lane, III et al.
patent: 5155061 (1992-10-01), O'Connor et al.
patent: 5174926 (1992-12-01), Sahagen
patent: 5178015 (1993-01-01), Loeppert et al.
patent: 5189591 (1993-02-01), Bernot
patent: 5189916 (1993-03-01), Mizumoto et al.
patent: 5201228 (1993-04-01), Kojima et al.
patent: 5201977 (1993-04-01), Aoshima
patent: 5214961 (1993-06-01), Kojima et al.
patent: 5227068 (1993-07-01), Runyon
patent: 5231301 (1993-07-01), Peterson et al.
patent: 5236118 (1993-08-01), Bower et al.
patent: 5261999 (1993-11-01), Pinker et al.
patent: 5271277 (1993-12-01), Pandorf
patent: 5287746 (1994-02-01), Broden
patent: 5294760 (1994-03-01), Bower et al.
patent: 5314107 (1994-05-01), d'Aragona et al.
patent: 5319324 (1994-06-01), Satoh et al.
patent: 5326726 (1994-07-01), Tsang et al.
patent: 5332469 (1994-07-01), Mastrangelo
patent: 5349492 (1994-09-01), Kimura et al.
patent: 5381300 (1995-01-01), Thomas et al.
patent: 5424650 (1995-06-01), Frick
patent: 5437189 (1995-08-01), Brown et al.
patent: 5471884 (1995-12-01), Czarnocki et al.
patent: 5483834 (1996-01-01), Frick
patent: 5554809 (1996-09-01), Tobita et al.
patent: 5637802 (1997-06-01), Frick et al.
"Silicon-on-Sapphire Pressure Sensor", by C. Qinggui et al., Transducers, (1987), 4 pgs.
"Spectroscopic Study of the Surfaces of Glass Joined by Optical Contact", by V.M. Zolotarev et al., Sov. J. Opt. Technol., (Jun. 1977), pp. 379-380.
"Effect of Scale and Time Factors on the Mechanical Strength of an Optical Contact", by S.S. Kachkin et al., Sov. J. Opt. Technol., vol. 56, No. 2, (Feb. 1989), pp. 110-112.
"High Pressure Sensors", Instrument Engineers Handbook vol. 1, Process Measurement, B. Liptak, Editor, pp. 244-245.
"Silicon on Sapphire: The Key Technology for High-Temperature Piezoresistive Pressure Transducers", by H.W. Keller et al., Transducers, (1987), 4 pgs.
"Optical-Contact Bonding Strength of Glass Components", by S.S. Kachkin et al., Sov. J. Opt. Technol., vol. 47, No. 3, (Mar. 1980), pp. 159-161.
"A Cold High-Vacuum Seal Without Gaskets", by L. Macebo, University of California Lawrence Radiation Laboratory, (Sep. 1, 1962), pp. 1-11.
"Diffusionsschweissen Optischer Bauelemente Aus Quarzglas", by K. Veb et al., Schweisstechnik, Berlin, (1983), pp. 262-264.
"Pressure and Temperature Measurements with Saw Sensors", by D. Hauden et al., 36th Annual Frequency Control Symposium, (1982), pp. 284-289.
"Transient Response of Capacitive Pressure Sensors", by P. Pons et al., Sensors and Actuators, (1992). pp. 616-621.
"Analysis and Design of a Four-Terminal Silicon Pressure Sensor at the Centre of a Diaphragm", by M. Bao et al, Sensors and Actuators, (1987), pp. 49-56.
"A Stress and Temperature Compensated Orientation and Propagation Direction for Surface Acoustic Wave Devices", by B. Sinha, I

Affiliated with

Also associated with

Rating

Pressure sensor cavity etched with hot POCL.sub.3 gas does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Pressure sensor cavity etched with hot POCL.sub.3 gas, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pressure sensor cavity etched with hot POCL.sub.3 gas will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1475808