Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1986-09-12
1988-01-26
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158D, 324158T, 250305, 250310, 250311, G01N 23225
Patent
active
047219106
ABSTRACT:
Apparatus for measuring the voltage waveform on the metallization lines of an integrated circuit is described. Short high powered pulses of light are coupled from a laser and focused on the metallization line of the integrated circuit which is coupled to receive a voltage waveform that is synchronized to the output laser pulses. Electrons are emitted from the metallization line due to the multiphoton photoelectronic effect induced by the pulses of light. An electron energy analyzer having a uniform extraction grid as its most remote element is positioned with the extraction grid as close as possible to the integrated circuit and the laser pulses are focused through one of the holes of this uniform grid. An output circuit is connected in a feedback arrangement which receives the output pulses of the energy analyzer and develops a voltage on a second uniform grid called the retarding grid that is positioned a predetermined distance from the extraction grid inside the electron energy analyzer. A sinusoidal voltage is superimposed on the signal provided to the retarding grid in order to eliminate the effect of noise components in the amplitude of the laser pulses.
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Bokor Jeffrey
Johnson Anthony M.
Storz Ralph H.
American Telephone and Telegraph Company AT&T Bell Laboratories
Dubosky Daniel D.
Eisenzopf Reinhard J.
Nguyen Vinh P.
Ranieri Gregory C.
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