Acoustic transducers and method of microfabrication

Details Acoustic transducers and method of microfabrication Acoustic transducers and method of microfabrication

1998-03-31

1999-11-09

Lobo, Ian J.

Communications, electrical: acoustic wave systems and devices

Signal transducers

Underwater type

367173, 367174, 381174, H04R 1700

Patent

active

059827092

ABSTRACT:
There is provided an acoustic transducer which includes a membrane of selected size and shape supported at its edges spaced from a first conductive electrode by an integral support structure with the second conductive electrode comprising a thin metal film on the membrane. The active membrane area is undisturbed by etch vias.

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