Microfabricated silicon thermopile sensor

Details Microfabricated silicon thermopile sensor Microfabricated silicon thermopile sensor

1997-05-30

1999-11-09

Williams, Alexander Oscar

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Temperature

257327, 257 9, 257347, 257712, 136225, 136212, 136230, 2503381, 2503384, 250332, 250349, H01L 3504, H01L 3528, G01N 2500

Patent

active

059820144

ABSTRACT:
A microfabricated thermopile optimized as a differential temperature sensor provides differential temperature sensing between opposite edges of the device. A plurality of the thermopile sensors are stacked to increase the number of couples possible with an attendant increase in sensitivity.

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Integrated Thermopile Sensors in Sensors and Actuators, A21-A23 (1989) 621-630.

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