Chemistry: electrical and wave energy – Processes and products – Processes of treating materials by wave energy
Patent
1982-06-18
1985-04-16
Williams, Howard S.
Chemistry: electrical and wave energy
Processes and products
Processes of treating materials by wave energy
2041571H, 430270, B01J 1908, H01L 2928
Patent
active
045114455
ABSTRACT:
The conductivity of a wide range of carbon-containing materials is substantially increased by irradiation with particles having an atomic mass of at least 1. Both polymeric and nonpolymeric, organic and inorganic, materials can be used. The particulate irradiation, for example an ion beam, substantially breaks down the material to a form that includes amorphous carbon having unusually high conductivity. Resistivities of less than 10.sup.-3 ohm-cm are possible. When applied as a film on a substrate, the irradiated material can be used for device interconnects. Conducting lines can be produced in the film, as well as vertical contacts through the film.
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Forrest Stephen R.
Kaplan Martin L.
Schmidt Paul H.
Venkatesan Thirumalai N. C.
AT&T Bell Laboratories
Fox James Hoppes
Ostroff Irwin
Williams Howard S.
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