Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent
1996-11-18
1999-01-26
Walberg, Teresa J.
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
219441, 392411, E27B 924, E27B 936, H01L 2102
Patent
active
058641190
ABSTRACT:
An infrared conveyor furnace with controllable point source radiation elements incorporating a clean room internal environment. The conveyor transports moieties in an indexed manner through multiple heating zones heated by arrays of lamps. The lamps of each array are divided into a plurality of groups which are separately controlled to maintain a constant temperature across the surface of the moiety. The control of the lamp groups is accomplished through the use of a controller utilizing data from FTIR sensors mounted in a fused quartz barrier which is permeable by infrared radiation but which seals the lamp arrays from the heating zones.
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Bolton Douglas A.
Vogt Lester H.
Pelham J.
Radiant Technology Corporation
Walberg Teresa J.
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