Refrigeration – Low pressure cold trap process and apparatus
Patent
1997-05-02
1999-01-26
Kilner, Christopher B.
Refrigeration
Low pressure cold trap process and apparatus
417901, B01D 800
Patent
active
058626719
ABSTRACT:
A cryopump is regenerated by roughing the cryopump during purging. Purging and roughing is carried out in first a high temperature mode and then a lower ambient temperature mode. In the lower temperature mode, the cryogenic refrigerator is turned on. If the system fails a rough test after roughing at the lower temperature, it is repurged with the rough valve open.
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Ash Gary S.
Bartlett Allen J.
Brightman Alan C.
Buonpane Maureen C.
Dresens Paul E.
Helix Technology Corporation
Kilner Christopher B.
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