Metrology instrument for measuring vertical profiles of integrat

Details Metrology instrument for measuring vertical profiles of integrat Metrology instrument for measuring vertical profiles of integrat

1981-09-28

1983-07-05

Little, Willis

Geometrical instruments

Area integrators

Electrical

33 1M, 33149J, G01B 728

Patent

active

043910440

ABSTRACT:
A surface profile measuring instrument, which has a stylus supported on a linear elongated beam for linear scanning. The beam is supported by a mounting mechanism which compensates for tilt by means of a servo. The stylus is pushed and pulled along the beam for linear scans of desired length.

REFERENCES:
patent: 2622371 (1952-12-01), Zuidierhoek
patent: 3182399 (1965-05-01), Price
patent: 3561125 (1971-02-01), Zeidler
patent: 3639993 (1972-02-01), Sartorio
patent: 3718049 (1973-02-01), Hanft
patent: 3774312 (1973-11-01), Esch
patent: 4103542 (1978-08-01), Wheeler et al.

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