Surface shape controlling device

Details Surface shape controlling device Surface shape controlling device

1985-10-10

1988-04-12

Hix, L. T.

Photocopying

Projection printing and copying cameras

Step and repeat

355 73, 355 91, G03B 2742

Patent

active

047378247

ABSTRACT:
A device for controlling the shape of a surface of a plate-like member such as a semiconductor wafer, includes support for supporting the plate-like member from a reverse surface thereof, a holding system for holding a portion of the reverse surface of the plate-like member on the support, and a control for controlling a pressure in a closed space which is related, when the plate-like member is supported by the support, to a portion of the reverse surface of the plate-like member other than the first-mentioned portion, such that the pressure in the closed space is changeable to be increased or decreased as compared with an initial pressure in the closed space when the plate-like member is supported by the support, to control deformation of the plate-like member to thereby control the surface shape of the plate-like member.

REFERENCES:
patent: 3320867 (1967-05-01), Miller
patent: 3834815 (1974-09-01), Grieg
patent: 4054383 (1977-10-01), Lin et al.
patent: 4218136 (1980-08-01), Komoriya et al.
patent: 4298273 (1981-11-01), Nishizuka et al.
patent: 4576475 (1986-03-01), Kitagawa et al.

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