Fishing – trapping – and vermin destroying
Patent
1986-09-12
1988-04-12
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437 47, 437 51, 437225, 437249, 437935, 437915, 156647, H01L 21302
Patent
active
047374705
ABSTRACT:
The disclosure relates to a three dimensional semiconductor structure formed in a semiconductor substrate wherein electrical components, both active and passive, are formed on the substrate surface as well as in grooves formed in the substrate at an angle and extending to the surface. The substrate surface is designed to lie in a predetermined crystallographic plane of the substrate material and the grooves extend in a predetermined crystallographic direction from said plane, this being accomplished by orientation dependent etching.
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Hearn Brian E.
Heiting Leo N.
Hoel Carlton H.
Sharp Melvin
Texas Instruments Incorporated
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