Process control monitoring system and method therefor

Details Process control monitoring system and method therefor Process control monitoring system and method therefor

1996-07-19

1998-12-29

Callahan, Timothy P.

Miscellaneous active electrical nonlinear devices, circuits, and

Specific signal discriminating without subsequent control

By amplitude

327 68, 327 83, H03K 5153, H03K 522

Patent

active

058545638

ABSTRACT:
The present invention relates to a process control monitoring system and method. The system and method uses current comparator circuits for monitoring process changes. Process sensitive current sources are compared with weighted reference current sources in a manner that each output of the current comparators demonstrates the inequality of the current sources. By setting the weighted reference current sources properly, the outputs of the current comparators may be used to locate the process corner of the fabricated integrated circuit.

REFERENCES:
patent: 5099192 (1992-03-01), Thayer et al.
patent: 5130582 (1992-07-01), Ishihara et al.
patent: 5163021 (1992-11-01), Mehrotra et al.
patent: 5204612 (1993-04-01), Lingstaedt
patent: 5508958 (1996-04-01), Fazio et al.

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