Semiconductor acceleration sensor

Details Semiconductor acceleration sensor Semiconductor acceleration sensor

1989-08-30

1991-02-05

Hille, Rolf

357 25, 357 55, H01L 2984, H01L 2966, H01L 2906

Patent

active

049909860

ABSTRACT:
A semiconductor acceleration sensor, including a semiconductor substrate, in which a mounting portion is formed in the substrate, and first and second cantilevered beams are formed in the substrate in opposite sides of the mounting portion so that these three members are aligned along a straight line, and in which a weight is formed at an end of the first cantilevered beam, and first and second strain sensing devices are formed in approximately the same layout in surface portions of the first and second cantilevered beams, respectively.

REFERENCES:
patent: 4345477 (1982-08-01), Johnson
patent: 4706374 (1987-11-01), Murakami

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