Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1989-05-01
1990-12-18
Willis, Davis L.
Optics: measuring and testing
By particle light scattering
With photocell detection
356359, G01B 902
Patent
active
049782193
ABSTRACT:
An apparatus for optically measuring the roughness of a surface of a subject in a non-contacting manner, based on a heterodyne interference wherein a phase of a beat beam produced by a reference laser beam, and a measuring laser beam reflected by the surface of the subject and having a wavelength different from that of the reference laser beam is changed with a change in the length of an optical path of the measuring laser beam, which occurs due to a change in the surface roughness of the subject. The apparatus includes a laser source for producing the reference and measuring laser beams, a lens device having an object lens for converging the measuring laser beam on the subject surface, and a deflector for deflecting the measuring laser beam before the measuring laser beam is incident upon the subject surface, whereby the point of convergence of the measuring laser beam is moved on the subject surface in a direction parallel to the surface, while the subject is held stationary.
REFERENCES:
patent: 3796495 (1974-03-01), Laub
patent: 4627730 (1986-12-01), Jungerman et al.
patent: 4741620 (1988-05-01), Wickramasinghe
Brother Kogyo Kabushiki Kaisha
Koren Matthew W.
Willis Davis L.
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