Vibration isolator for cryopump

Details Vibration isolator for cryopump Vibration isolator for cryopump

1984-02-27

1985-09-10

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 62268, 62295, 248638, 417901, B01D 800

Patent

active

045398224

ABSTRACT:
A vibration isolator is disclosed to mount a cryopump expander module or other vibrating equipment on a vacuum housing. The isolator includes a welded metal bellows which both forms a vacuum-tight passage and acts as an isolating spring, and a plurality of elastomeric isolators which clamp the oscillations of the bellows.

REFERENCES:
patent: 3609992 (1971-10-01), Cacheux
patent: 3721101 (1973-03-01), Sheppard et al.
patent: 3742729 (1973-07-01), Zulliger
patent: 3894403 (1975-07-01), Longsworth
patent: 4216505 (1980-08-01), Grant et al.
patent: 4363217 (1982-12-01), Venuti
patent: 4394819 (1983-07-01), Averill

Affiliated with

Also associated with

Rating

Vibration isolator for cryopump does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vibration isolator for cryopump, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vibration isolator for cryopump will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1421264