Multiple narrow-line-channel fet having improved noise character

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Field effect transistor

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257194, H01L 310328, H01L 310336

Patent

active

057264678

ABSTRACT:
Insulating layers are formed, for instance, by ion injection, in a multilayer of compound semiconductor layers in regions spaced at predetermined intervals, to leave a plurality of narrow channel layers between the insulating layers. A gate electrode is formed on the insulating layers and channel layers so as to traverse those layers.

REFERENCES:
patent: 4021789 (1977-05-01), Furman et al.
patent: 4796068 (1989-01-01), Katayama et al.
European Search Report dated Apr. 15,1993 in Application No. EP 92 11 7924.

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