Polishing pad and polishing apparatus having the same

Details Polishing pad and polishing apparatus having the same Polishing pad and polishing apparatus having the same

1997-06-25

1998-12-29

Rose, Robert A.

Abrading

Machine

Rotary tool

451287, 451530, 451533, 451527, 451526, 451921, 451 41, 451548, 451550, 451446, B24B 2900

Patent

active

058533176

ABSTRACT:
A polishing pad made of a flexible material includes a first major surface, a second major surface, and a large number of holes. The first major surface is urged by a rotatable polishing target member to polish a polishing target surface of the urged polishing target member by using a slurry. The second major surface is adhered to a rotatable platen. The large number of holes extend between the first and second major surfaces and serve as slurry reservoirs. The holes have a larger opening area on the second major surface than that on the first major surface. A polishing apparatus is also disclosed.

REFERENCES:
patent: 4490948 (1985-01-01), Hanstein et al.
patent: 4841680 (1989-06-01), Hoffstein et al.
patent: 5533923 (1996-07-01), Shamouillian et al.
patent: 5658185 (1997-08-01), Morgan, III et al.

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