Surface acoustic wave device and method for fabricating same

Details Surface acoustic wave device and method for fabricating same Surface acoustic wave device and method for fabricating same

1991-01-03

1992-05-05

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313R, 310319D, H01L 4107

Patent

active

051111004

ABSTRACT:
A surface acoustic wave device is disclosed, by which it is possible to improve characteristics of a system suitable for suppressing narrow frequency band interference, which is useful for a spread spectrum communication system, and to increase the signal intensity at the detecting portion without changing characteristics of the filter portion.
In a surface acoustic wave element, in a p conductivity type Si epitaxial layer 2 formed on a p+ conductivity type Si monocrystal substrate 1 the epitaxial layer on the siganl detecting portion is formed so as to be thinner than the other portion by means of a buried layer.
In this way, even with a same intensity of the input signal at the transducer, the loss of SAW is reduced and as the result the intensity of the detected signal is increased.
By the present invention it is possible to increase the signal intensity at the detecting portion without changing characteristics of the filter portion.

REFERENCES:
patent: 4194171 (1980-03-01), Jelks
patent: 4567393 (1986-01-01), Asai et al.
patent: 4611140 (1986-09-01), Whitlock et al.
patent: 4665374 (1987-05-01), Fathimulla
patent: 4697115 (1987-09-01), Mitsutsuka
patent: 4757226 (1988-07-01), Mitsutsuka et al.

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