Optical measurement system determination of an object profile

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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356376, G01N 2186

Patent

active

051110563

ABSTRACT:
An optical measurement system for determination of an object profile includes a light source for emitting a light beam, light directing means for directing the light beam to scan a surface of the object surface and for directing a reflected light beam from the object surface in a direction angled from that of the light beam incident to the surface. The reflected light beam is received at position detecting means to provide position data with respect to the individual scanned points on the object surface. The position data is analyzed to measure a series of distances to the individual scanned points on the object surface to obtain from the measured distances height data of the individual scanned points and to determine an object profile along the scanned point on the object surface. The light directing means comprises a single deflector which deflects the light beam onto the object for scanning the object surface thereby, a first projecting lens interposed between the deflector and the object to project the light beam on the object surface, and a second receiving lens offset from the first projecting lens and interposed between the object surface and the common deflector to converge the reflected beam from the object surface on the light receiving elements. The deflector is in the form of a planar vibration mirror upon which the light beam from the light source and the reflected light beam from the object surface are incident.

REFERENCES:
patent: 3866038 (1975-02-01), Korth
patent: 3986774 (1976-10-01), Lowrey, Jr. et al.
patent: 4171917 (1979-10-01), Pirlet
patent: 4373804 (1983-02-01), Pryor et al.
patent: 4627734 (1986-12-01), Rioux

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