Apparatus for heating and cooling devices under test

Details Apparatus for heating and cooling devices under test Apparatus for heating and cooling devices under test

1979-03-12

1982-04-13

Davis, Albert W.

Heat exchange

Regenerator

Checker brick structure

165 30, 62514R, 73 15R, 219241, F25B 1300

Patent

active

043242855

ABSTRACT:
Apparatus having a high temperature probe and a low temperature probe, with each probe adapted to make thermal contact with a microelectronic device under test for sequentially heating the device first to a preselected high temperature and then cooling the device to a preselected low temperature. A control system is provided, connected to each of the probes by a small diameter, flexible cable. Each probe is a small, box-like structure having a heat sink as a base, a resistance heater attached to the heat sink, and a heat-sensing diode embedded in the heat sink. The control system senses the heat sink temperature and controls current through the heater to maintain the heat sink at a preselected temperature. The high temperature probe is placed on the top surface of a device under test and serves to add heat quickly thereto to bring the device to a preselected temperature above ambient. The low temperature probe includes a reservoir in contact with its heat sink for holding chips of dry ice, and when the latter probe is placed on the top surface of a device under test, the sublimating dry ice removes heat from the device. The heater portion of the low temperature probe serves to add heat to its heat sink when the device tends to become cooler than a preselected below-ambient temperature. An indicator is utilized to read the heat sink temperature of the probe in use at a given instant.

REFERENCES:
patent: 2915614 (1959-12-01), Loomis
patent: 3256734 (1966-06-01), Storke
patent: 3279239 (1966-10-01), Arends et al.
patent: 3321953 (1967-05-01), Roveti
patent: 3408565 (1968-10-01), Frick et al.
patent: 3412333 (1968-11-01), Frick et al.
patent: 3533274 (1970-10-01), Bishop et al.
patent: 3702932 (1972-11-01), Tanner et al.
patent: 3710251 (1973-01-01), Hagge et al.
patent: 3979671 (1976-09-01), Meeker et al.
patent: 4134447 (1979-01-01), Jennings et al.

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