Apparatus for measuring ions in a clean room gas flow using a sp

Details Apparatus for measuring ions in a clean room gas flow using a sp Apparatus for measuring ions in a clean room gas flow using a sp

1993-09-17

1996-04-09

Snow, Walter E.

Electricity: measuring and testing

Using ionization effects

For analysis of gas, vapor, or particles of matter

324459, G01N 2762

Patent

active

055065074

ABSTRACT:
An apparatus for measuring ions in a gas which has a sensor around which the gas flows, the ions giving off their charge and giving rise to a current. The sensor is constructed as an electrode with a flow-favorable shape, such as a sphere. A fixed voltage is impressed on the electrode and the current produced at the electrode is measured, evaluated in a circuit and constitutes a measure for the ion count.

REFERENCES:
patent: 3248644 (1966-04-01), Streib et al.
patent: 3359796 (1967-12-01), Dimick
patent: 4435681 (1984-03-01), Masuda et al.

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