Method of heat augmented resistor trimming

Details Method of heat augmented resistor trimming Method of heat augmented resistor trimming

1991-06-03

1992-05-05

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437170, 437172, 437918, 437919, 148DIG71, H01L 2114, H01L 21306, H01L 21326

Patent

active

051107589

ABSTRACT:
An improved method of trimming resistors by metal migration by local heating (18,21) of the resistor (23) to allow a reduced level of electric current to be used. The resistor is then trimmed by application of short pulses of high current causing metal migration (22). Each pulse decreases the resistance progressively until a desired final value is achieved. The reduced level of current of the improved method requires a reduced voltage across the resistor thus extending the earlier method to allow higher valued resistors, or lower breakdown voltages. The localized heating (18,21) is also used to anneal the migrated metal after trimming to increase the long term stability of the resistor (23). The intensity of the localized heating (18,21) can be varied to induce a desired shape in the migrated metal (22).

REFERENCES:
patent: 4467312 (1984-08-01), Komatsu
patent: 4505490 (1986-04-01), Raffel et al.
patent: 4560583 (1985-12-01), Monsvold
patent: 4606781 (1986-08-01), Vync
patent: 4707909 (1987-11-01), Blanchard
patent: 4713680 (1987-12-01), Davis et al.
patent: 4810663 (1989-03-01), Raffel et al.

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