Integrated circuit

Details Integrated circuit Integrated circuit

1976-01-23

1977-03-08

Edlow, Martin H.

357 48, H01L 2702

Patent

active

040115801

ABSTRACT:
Improved epitaxial resistor for use in integrated circuits in which for the lateral boundary boundary zones projecting beyond the isolation zones are provided at the surface with a depth of penetration which is smaller than the thickness of the epitaxial layer. Such resistors can be manufactured with a considerably smaller spread of the resistance value than the so far usual epitaxial resistors.

REFERENCES:
patent: 3860836 (1975-01-01), Pederson
Weidmann, I.B.M. Tech. Discl. Bull., vol. 13, No. 5, Oct. 1970.

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