Method for making a self-aligned impurity induced disordered str

Details Method for making a self-aligned impurity induced disordered str Method for making a self-aligned impurity induced disordered str

1990-11-27

1991-10-29

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437129, 437158, 437160, 437905, 148DIG31, H01L 2120, H01L 21225

Patent

active

050616560

ABSTRACT:
A method for making a self-aligned IID structure for an LED (10) is provided. This self-aligned IID structure is accomplished by depositing a dopant layer (17) over the LED structure. A polymeric material is deposited over layer (17). The polymeric layer and dopant containing layer (17) are etched to a predetermined position. The remaining polymeric material is removed from the LED (10) structure. The LED (10) structure is annealed to produce an IID structure by laterally diffusing dopants from layer (17) into at least one side wall of the LED (10).

REFERENCES:
patent: 4166278 (1979-08-01), Susaki et al.
patent: 4727556 (1988-02-01), Burnham et al.

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