Field emission electron gun system

Details Field emission electron gun system Field emission electron gun system

1989-06-14

1990-07-31

Berman, Jack I.

Radiant energy

Ion generation

Field ionization type

313156, 313443, H01J 37073

Patent

active

049452479

ABSTRACT:
In a field emission electron gun system with a multi-stage acceleration tube comprising a field emission electron source, a field emission electrode for extracting the electrons, a magnetic lens having a magnetic gap between the field emission electron source and the field emission electrode or a magnetic lens having a magnetic pole which also serves as the field emission electrode, and at least two-stages of acceleration electrodes for accelerating the electrons, a magnetization current I for the magnetic lens is changed interlocking with a field emission voltage V.sub.1 applied between the field emission electron source and the field emission electrode so that IN/.sqroot.V.sub.1 (N: the number of windings of the magnetic lens) takes a predetermined value and a first acceleration voltage V.sub.2 applied between the field emission electron source and the first-stage acceleration electrode is changed interlocking with the field emission voltage V.sub.1 so that V.sub.2 /V.sub.1 takes a predetermined value.

REFERENCES:
patent: 4315152 (1982-02-01), Smith
patent: 4544845 (1985-10-01), Michel
patent: 4725736 (1988-02-01), Crewe
patent: 4782235 (1988-11-01), Lejeune et al.

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