Method for producing a beryllium oxide film

Details Method for producing a beryllium oxide film Method for producing a beryllium oxide film

1982-07-29

1984-05-29

Smith, John D.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

4272553, 4271263, 204192N, 156614, 156611, 118723, 118 501, B05D 512

Patent

active

044514999

ABSTRACT:
A beryllium oxide (BeO) film is disclosed, which is produced by impinging partially ionized vapor of metal beryllium and oxygen upon a substrate.

REFERENCES:
patent: 3373051 (1968-03-01), Chu et al.
patent: 3925116 (1975-12-01), Engel
patent: 4090100 (1978-05-01), Byrum, Jr.
patent: 4147573 (1979-04-01), Morimoto
patent: 4197814 (1980-04-01), Takagi et al.
patent: 4213844 (1980-07-01), Morimoto et al.
patent: 4227961 (1980-10-01), Takagi

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