Regeneration-type cryopump

Refrigeration – Low pressure cold trap process and apparatus

Patent

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Details

62268, 417901, 55DIG15, B01D 500

Patent

active

040720250

ABSTRACT:
The invention relates to a regeneration-type cryopump which has an annular reservoir for liquid nitrogen situated above an annular reservoir for liquid helium and incorporates, sliding in the central opening in the said reservoir, a valve member which is mounted on a rod. When the valve member is in one position, the cryopump is in normal operation, whereas when the valve member is in another position and rests against a seating, regeneration may take place.
Such a pump may be used for generating very high vacua.

REFERENCES:
patent: 3019809 (1962-02-01), Ipsen et al.
patent: 3168819 (1965-02-01), Santeler
patent: 3668881 (1972-06-01), Thibault et al.
patent: 3797264 (1974-03-01), Thibault et al.

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