Method of using a hot pressed silicon carbide dummy wafer

Details Method of using a hot pressed silicon carbide dummy wafer Method of using a hot pressed silicon carbide dummy wafer

1997-03-03

1998-06-23

Lusignan, Michael

Stock material or miscellaneous articles

Composite

Of inorganic material

264 60, 423345, 427255, 501 88, B32B 900, B32B 1900

Patent

active

057703248

ABSTRACT:
This invention relates to hot pressed silicon carbide dummy wafers having low iron impurity levels, and a method of using hot pressed silicon carbide dummy wafers in silicon wafer processing applications.

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