X-ray imaging system

Details X-ray imaging system X-ray imaging system

1995-03-13

1997-05-13

Church, Craig E.

X-ray or gamma ray systems or devices

Source

Electron tube

378 986, 378141, H01J 3530

Patent

active

056299699

ABSTRACT:
In a micro focus X-ray imaging system using a transmission type target, a transmitted X-ray image is uniformly bright. The micro focus X-ray imaging system is structured so that (i) the fine focussed electron beam 1 is irradiated to a target in which a tungsten film 10 is deposited thinly on a beryllium foil 11, (ii) the tungsten film 10 is cooled by a circular thermoelectric cooling device 14, and (iii) an X-ray image intensifier 22 is installed other than on the prolonged line in a travel direction of the electron beam 1 and the transmitted X-ray image of a sample 7 is detected by the X-ray image intensifier 22 and the CCD camera 24. As a result thereof, in the case of a thin transmission-type target, intensive X-rays are generated in the travel direction of the electron beam and X-ray image intensifier is installed other than on the prolonged line in the travel direction of the electron beam, so that X-rays with a uniform intensity can be irradiated to the X-ray image intensifier and accordingly a transmitted X-ray image which is uniformly bright can be obtained.

REFERENCES:
patent: 2730566 (1956-01-01), Bartow et al.
patent: 3833810 (1974-09-01), Efanov et al.
patent: 5420906 (1995-05-01), Smit et al.

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