Exposure apparatus including two illuminating systems and exposu

Details Exposure apparatus including two illuminating systems and exposu Exposure apparatus including two illuminating systems and exposu

1993-10-13

1994-10-25

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Step and repeat

355 1, 355 46, 355 70, G03B 2742

Patent

active

053593898

ABSTRACT:
Disclosed are an exposure apparatus and process, including a holding unit for holding first and second objects such as a mask and a substrate, a first illumination system for illuminating the first object with an exposure light, a projection optical system for forming an image of a portion such as a pattern portion of the first object illuminated with the exposure light onto the second object and a second illumination system for illuminating a portion such as peripheral portion of the second object held by the holding unit outside of a portion of the second object illuminated with the exposure light from the first illumination system. The exposure apparatus or process may further include a moving unit or step for moving the first and second objects as a unit relative to the projection optical system and a control unit or step for causing the moving unit to move the first and second objects as a unit relative to the projection optical system while causing the first illumination system and the second illumination system to illuminate the first object and the second object, respectively, so that the image of the pattern on the first object is tranferred onto the second object through the projection optical system.

REFERENCES:
patent: 3494695 (1970-02-01), Sollima et al.
patent: 3687538 (1972-08-01), Matsumoto
patent: 3784301 (1974-01-01), Sato
patent: 3799666 (1974-03-01), Fukushima et al.
patent: 4620785 (1986-11-01), Suzuki et al.
patent: 4676630 (1987-06-01), Matsushita et al.
patent: 4696889 (1987-09-01), Yevick
patent: 4748477 (1988-05-01), Isohata et al.
patent: 4769680 (1988-09-01), Resor, III et al.
patent: 4770972 (1988-09-01), Nelson et al.
patent: 4785187 (1988-11-01), Kariya et al.
patent: 4785192 (1988-11-01), Bruning
patent: 4814830 (1989-03-01), Isohata et al.
patent: 4896183 (1990-01-01), Ohashi et al.
patent: 4998134 (1991-03-01), Isohata et al.

Affiliated with

Also associated with

Rating

Exposure apparatus including two illuminating systems and exposu does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Exposure apparatus including two illuminating systems and exposu, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Exposure apparatus including two illuminating systems and exposu will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-138910