System for photoelectric detection

Details System for photoelectric detection System for photoelectric detection

1985-09-05

1987-09-15

Wan, Gene

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356 4, H01J 4014, G01C 308

Patent

active

046941860

ABSTRACT:
A system for photoelectrically detecting a light reflected from an object, such as a semiconductor wafer, irradiated by a light beam supplied from a light source, wherein the amount of irradiation is controlled so as to obtain an optimum photoelectrically-converted signal. According to another aspect of the invention, the amount of irradiation is controlled automatically on the basis of a reflectance of the object which has been detected preparatively. According to another preferred form of the invention, the amount of irradiation is controlled in a time-sharing fashion so as to obtain optimum photoelectrically-converted signals from different portions of the object.

REFERENCES:
patent: 4427880 (1984-01-01), Kanade et al.

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