Fishing – trapping – and vermin destroying
Patent
1994-09-27
1996-04-09
Fourson, George
Fishing, trapping, and vermin destroying
437919, H01L 218242
Patent
active
055061664
ABSTRACT:
The invention is a storage cell capacitor and a method for forming the storage cell capacitor having a storage node electrode comprising a barrier layer interposed between a conductive plug and an oxidation resistant layer. A layer of titanium silicide is fabricated to lie between the conductive plug and the oxidation resistant layer. A thick insulative layer protects the sidewalls of the barrier layer during the deposition and anneal of a dielectric layer having a high dielectric constant. The method comprises forming the conductive plug in a thick layer of insulative material such as oxide or oxide
itride. The conductive plug is recessed from a planarized top surface of the thick insulative layer. Titanium is deposited and a rapid thermal anneal is performed. The titanium reacts with silicide of the conductive plug to form TiSi at the bottom of the recess. Unreacted Ti is removed. The barrier layer is then formed in the recess. The process is continued with a formation of an oxidation resistant conductive layer and the patterning thereof to complete the formation of the storage node electrode. Next a dielectric layer having a high dielectric constant is formed to overly the storage node electrode and a cell plate electrode is fabricated to overly the dielectric layer.
REFERENCES:
patent: 5187638 (1993-02-01), Sandhu et al.
patent: 5198384 (1993-03-01), Dennison
patent: 5335138 (1994-08-01), Sandhu et al.
patent: 5366920 (1994-11-01), Yamamichi et al.
Fazan Pierre C.
Sandhu Gurtej S.
Booth Richard A.
Fourson George
Micro)n Technology, Inc.
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